Customized OEM Isolation Modules for Scanning Electron Microscope

Halcyonics and Tescan developed an active vibration isolation solution for Tescan's SEMs in a close cooperation. After several technology improvements and extensive tests, the new Halcyonics solution now reduces the influence of vibration and shocks to SEM images to a lowest minimum. The result is much better than possible with conventional passive pneumatic isolation systems.

The above pictures show the difference of images, both taken with a Tescan Mira\ SEM. The first picture was performed with pneumatic passive vibration isolation, the second was obtained with Halcyonics active vibration isolation. The test vibration was induced by a person stomping very strong on the floor. The biggest pulse excitation of the floor was generated by a person weighing 100 kg jumping from a height of approx. 30 cm. This is a really good example of the ultimate performance of Halcyonics active units.

Compared to a conventional passive vibration isolation system, the active units for Tescan SEMs provide excellent vibration isolation characteristics, even at exceptionally low frequencies of 2 to 3 Hz. This is the typical range caused by people walking near the microscope. The isolation effect starts at 1 Hz and it attains more than 35 dB above 10 Hz. Due to its short settling time, the active system effectively compensates shock influences created by various different vibration sources in a building. Using the new active system, SEM images remain undisturbed by common vibration influences while working with the Microscope.